MEMS and NEMS : Systems, Devices and Structures
Lyshevshi,Sergey Edward
MEMS and NEMS : Systems, Devices and Structures - 1st Ed. - New York CRC Press Florida 2002 - 461p.
0-8493-1262-0
Electronics Engineering
621.381 / LY-M
MEMS and NEMS : Systems, Devices and Structures - 1st Ed. - New York CRC Press Florida 2002 - 461p.
0-8493-1262-0
Electronics Engineering
621.381 / LY-M
