Lyshevshi,Sergey Edward <br/><br/>
MEMS and NEMS : Systems, Devices and Structures 

 - 1st Ed. 
 - New York  CRC Press Florida  2002 
 - 461p. 
<br/><br/><label>ISBN: </label>0-8493-1262-0 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics Engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / LY-M