TY  - BOOK
AU  - Lyshevshi,Sergey Edward
TI  - MEMS and NEMS : Systems, Devices and Structures
SN  - 0-8493-1262-0
U1  - 621.381 
PY  - 2002///
CY  - New York
PB  - CRC Press Florida
KW  - Electronics Engineering
ER  -