000			00430nam a2200169Ia 4500
008			230711s9999||||xx |||||||||||||| ||und||
020			_a0-387-25874-4
041			_aENG
082			_a620.5 _bJA-M
100			_aJackson,Mark J
245		0	_aMicro and Nanomanufacturing
250			_a1st Ed.
260			_c2007 _aNew York _bSpringer Science & Business Media
300			_a699p.
650			_aElectronics Engineering
942			_cBK
999			_c6595 _d6595