000			00445nam a2200169Ia 4500
008			230711s9999||||xx |||||||||||||| ||und||
020			_a0-8493-1262-0
041			_aENG
082			_a621.381 _bLY-M
100			_aLyshevshi,Sergey Edward
245		0	_aMEMS and NEMS : Systems, Devices and Structures
250			_a1st Ed.
260			_c2002 _aNew York _bCRC Press Florida
300			_a461p.
650			_aElectronics Engineering
942			_cBK
999			_c6600 _d6600